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- Description
- Specifications
- For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control
- A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator
- The 8931-115SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies
- There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time
- This can minimize the errors associated with this calibration and control one of the more critical process variables
Brand:Â Bird
Connector Type:Â LC, Female
Frequency:Â 28 MHz
Series:Â 8930 Series
Certifications:Â RoHS
Dimensions:Â 32.8 x 9.5 x 33.4"
Finish:Â Black Epoxy Resin
Impedance: 50 Ω
Input Voltage:Â 115 VAC
Operating Temperature Range: 5-40°C
Power:Â 10 kW
Special Features:Â Oil dielectric and convection currents
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